| 1. | Photo assisted vapor phase epitaxial growth system 光辅助汽相磊晶生长系统 |
| 2. | Reduced pressure vapor phase epitaxial growth system 减压汽相磊晶生长系统 |
| 3. | Reduced presure vapor phase epitaxial growth system 减压汽相磊晶生长系统 |
| 4. | Metal organic vapor phase epitaxial growth system movpe system 有机金属汽相磊晶生长系统 |
| 5. | Low pressure vapor phase epitaxial growth system 低压汽相磊晶生长系统 |
| 6. | Low presure vapor phase epitaxial growth system 低压汽相磊晶生长系统 |
| 7. | Vapor phase epitaxial growth system 汽相磊晶生长系统 |
| 8. | Vapor phase epitaxial growth 汽相外延生长 |